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Чистые помещения/, Пер. с японского, В. Ю. Акифьева, Л. Н. Дмитрука, М. Е. Панюкова

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Material type: Text

TextLanguage: Russian Publication details: Москва: Мир, 1990.Description: 456сSubject(s):

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Institute of Radiophysics & Electronics	General	621.3 Ч 688 (Browse shelf(Opens below))	Available		16165

Библиогр.:с.439-450

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