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Химико-технологическая аппаратура микроэлектроники / А.Т.Мягков, Е.М.Корсетов

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Material type: Text

TextLanguage: Russian Publication details: Москва : Энергия , 1979.Description: 312 сSubject(s):

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Institute of Radiophysics & Electronics	General	621.3.049 М 990 (Browse shelf(Opens below))	Available		IRE14137

Библиогр.:с.305-310

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