Электронно- лучевая технология в изготовлении микроэлектронных приборов / Пер. с англ. Ф.П.Пресса
Material type: TextLanguage: Russian Publication details: Москва : Радио и связь, 1984.Description: 336 сOther title:- Electro- beam technology in microelectronic fabrication
- 621.3
Item type | Current library | Collection | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | Institute of Radiophysics & Electronics | General | 621.3 Э 455 (Browse shelf(Opens below)) | Available | 15471 |
Библиогр.: с. 316-328
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