Lau, W. S.
Infrared characterization for microelectronics /
W.S. Lau.
- Singapore ; River Edge, NJ : World Scientific, c1999.
- x, 160 p. : ill. ; 23 cm.
Includes bibliographical references and index.
9810223528
99044781
Microelectronics--Materials--Testing.
Infrared spectroscopy.
Absorption spectra.
621.381