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Микролитография . принципы,методы,материалы / У.Моро :Пер. с англ. Д.Ю.Зарослова, К.Я.Мокроусова, В.А.Никитаева

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TextLanguage: Russian Publication details: Москва : Мир, 1990.Description: Часть 2Other title:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Institute of Radiophysics & Electronics	General	621.38 M 800 (Browse shelf(Opens below))	Available		IRE16221

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