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Оборудование полупроводникового производства/

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Material type: Text

TextLanguage: Russian Publication details: Москва: Радио и связь, 1981.Description: 336 сSubject(s):

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Institute of Radiophysics & Electronics	General	621.382 О 224 (Browse shelf(Opens below))	Available		IRE14765

Библиогр.: с. 330-333

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