Технологический контроль размеров в микроэлектроном производстве / Ю.А.Быстров,Е.А.Колгин,Б.Н.Котлецов
Material type: TextLanguage: Russian Publication details: Москва : Радио и связь, 1988.Description: 168 сSubject(s): DDC classification:- 621.3
Item type | Current library | Collection | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | Institute of Radiophysics & Electronics | General | 621.3 Б 955 (Browse shelf(Opens below)) | Available | 16080 |
Библиогр.: с. 162 - 165
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