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Infrared characterization for microelectronics /

Lau, W. S.

Infrared characterization for microelectronics / W.S. Lau. - Singapore ; River Edge, NJ : World Scientific, c1999. - x, 160 p. : ill. ; 23 cm.

Includes bibliographical references and index.

ISBN: 9810223528

LCCN: 99044781

Subjects--Topical Terms:
Microelectronics--Materials--Testing.
Infrared spectroscopy.
Absorption spectra.

Dewey Class. No.: 621.381

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